Presentation icon  Nanomanufacturing: Semiconductor Manufacturing

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Nanomanufacturing 1: Semiconductor manufacturing

  • From Si crystals to Wafers
  • From Wafers to Chips
  • Photolithography: Definitions
  • Optical Lithography
  • Multi-Photon Lithography
  • E-Beam Lithography
  • Imprinting Lithography
  • Scanning probe lithography
  • Additive Processes
  • Thermal Oxidation
  • Diffusion
  • Thermal Evaporation
  • Evaporation: Shadowing
  • Planetary Evaporator
  • Subtractive Process
  • Etching
  • Etch Selectivity
  • Anisotropic Wet Etching
  • Dry Etching Profiles
  • Process Flow
  • Processing Steps in Final Packaging
  • Yield issue in processing

Keywords: nanomanufacture • semiconductor • lithography • wafers • chips • evaporation • etching • processing • surface treatment • e-beam • presentation
Categories: Materials > Ceramics & glasses > Technical ceramics > Carbon and graphite
Processes > Surface treatments > Heat treatments
Processes > Surface treatments > Painting and printing
Processes > Surface treatments > Polishing, etching, working, texturing, cleaning
Properties > Electrical, magnetic & optical > Semiconductivity
Scale > Nano(-materials)
Created by: Nicholas X. Fang, University of Illinois at Urbana-Champaign
License: This resource is released under the Creative Commons Attribution Non-Commercial Share Alike license (3.0 Unported).
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Date created: 11 May 2009
Date added: 26 January 2011
Resource ID: 3368