Video/animation icon  Radio-frequency (RF) magnetron sputtering

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Resource type: Video/animation
Description: On-line training for the use of experimental equipment: Radio-frequency (RF) magnetron sputtering. Magnetron sputtering is an extremely flexible coating technique that can be used to coat virtually any material. Sputtering is basically the removal of atomised material from a solid by energetic bombardment of its surface layers by ions or neutral particles. Magnetron sputtering can be done either in DC or RF modes. RF sputtering can be done both conducting and non conducting materials. The resources consists of nine Flash videos, covering all stages of the experimental procedure: 1. Venting; 2. Loading; 3. Creating a vacuum; 4. Filling the chamber with gas; 5. Turning the RF on; 6. Striking a plasma; 7. Grow a film; 8. Unloading; 9. Sleep mode.
Keywords: thin film • coating • radio-frequency • venting • vacuum • chamber • plasma • thin film • magnetron • sputter • substrate • deposition • experimental equipment • interactive • text • video
Categories: Processes > Shaping > Deposition
Processes > Surface treatments > Surface coatings
Product Forms > Flat > Foil, film & tape
Properties > Electrical, magnetic & optical > Magnetic
Created by: Dr. Nicola Morley, The University of Sheffield
License: This resource is released under the Creative Commons Attribution license (3.0 Unported).
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Date created: 31 March 2011
Date added: 15 June 2011
Resource ID: 3645